Dispenser & Bonder
DNC-6000LD
DNC-6000LD Multi-Pixel LED Wafer Level Dispenser
본 장비는 자동차용 Headlight에 적용되는 Multi-Pixel LED를 제조하는 공정에서 Wafer상에 형성된 LED Pixel에 Phosphor가
포함된 형광체 용액을 각 Pixel LED에 초정밀, 미량을 도포하는 정밀 장비로. 적용된 Linear Pump 밸브는 그 동안의 LED Phosphor에
의한 마모로 발생된 토출 품질 문제를 완전 해결함과 동시에 초소량 토출 제어가 가능합니다.
또한 밸브 변경에 따라 다양한 공정에 사용할 수 있습니다.
- Target Wafer
- 8 Inch Wafer
- Dispensing Module
- 1) Valve System : JET / Linear / Auger (Depend on product)
2) Air Pressure : 0 ~ 500kPa
3) Dispensing Area : 8 Inch Wafer
4) Dispensing Accuracy : +/- 25um (Depend on material)
5) Dispensing Speed : 0 ~ 200 mm/sec
6) Weight Control : 0.01mg Scale - Wafer Lo/Unloading
- Wafer Handler Robot
- Work Station
- - Finger Type Vacuum Station
- Heating : 0 ~ 150'C
- Theta Angle Correction - XYZ Motion
- 1) Driving Type : Stone Tablet, Linear Servo (Gore Cable)
2) Repeatbility : +/-5um
3) Encoder Resolution : 0.5um
4) Speed (Acceleration) : 1000mm/sec (1G)
5) Travel Area : 400mm x 400mm - Vision
- 1) Align Algorithm : Geomtry Model Finder / Pattern Matching / Corner Finder
2) Dispensing Post Inspection : Support
3) Bad Product Detector : Support
4) Camera : GigE Interface 5M pixel - Height Sensor
- 1) Laser Type : Confocal Laser Sensor
2) Accuracy : +/- 0.75um
3) Resoution : 60nm
4) Dispensing Height Measuring : Support - SECS/GEM
- Support
- System & Facility
- 1) OS : Window 10 Pro.
2) SW : DisCraft
3) Supply :
- Air : 5Kgf/cm2
- Electrical : 200V ~ 240VAC, 50~60Hz, 1Phase, 16A
4) Diemsion (Weight) : 890(W) X 1,180 X 1,670(H) (1ton)
5) EFU : Hepa Filter (99.97% @0.3㎛)
6) Pass Line : 900 ± 20 mm
